Fabrication method of semiconductor integrated circuit device and its testing apparatus

ABSTRACT

There is provided a testing apparatus and a fabricating method of a semiconductor integrated circuit device for reducing the fabrication cost by placing, in the wafer level burn-in, the divided contactors in equally contact with the full surface of wafer, enabling repair of each contactor and improving the yield of the contactors. The cassette structure of the mechanical pressurizing system in the testing apparatus is structured with a plurality of divided silicon contactor blocks and a guide frame for integrating these bocks and employs the wafer full surface simultaneous contact system of the divided contactor integration type. Thereby, each probe of the silicon contactor is equally placed in contact in the predetermined pressure with each test pad of each chip of the test wafer by mechanically pressuring each silicon contactor block which moves individually, the test control signal is supplied to each chip and this test result signal is obtained for the wafer level burn-in test.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to a technique for fabricating a semiconductor integrated circuit device and testing the same apparatus, and more specifically to a technique that can be applied, for example, to the burn-in test and probe test and effectively applied particularly to the burn-in test in the wafer condition, so-called to the wafer level burn-in test.

[0002] The present invention relates to a test technique and a fabrication technique of semiconductor integrated circuit device. According to the investigations by the inventors of the present invention regarding the burn-in test technique, for example, the official gazette of the Japanese Laid-Open Patent Applications Nos. HEI 11(1999)-97494, 9(1997)-148389 and “NIKKEI MICRO-DEVICE”, January 2000, pages 148 to 153 may be listed.

[0003] The official gazette of Japanese Laid-Open Patent Application No. HEI 11(1999)-97494 discloses the technique to equalize a pushing pressure by dividing a pushing member in order to share the pushing load to a plurality of places on the plane in the opposite side of the wafer side of the pushing member when a plurality of probes provided to the membrane are pushed toward the wafer using the pushing member in the burn-in test the wafer using the pushing member in the burn-in test process.

[0004] The official gazette of Japanese Laid-Open Patent Application No. HEI 9(1997)-148389 discloses a technique to form a beam that is holding elasticity toward the upper and lower directions on a silicon substrate with the micro-machining technique and also to form a micro- contact pin to an end of this beam in the layout provided opposed to the electrode of wafer with the conductive thin film process executed to the end of such micro-contact pin.

[0005] The reference “Nikkei MICRO-DEVICE, January 2000” describes a system using the TPS (Three Parts Structure) probe consisting of three parts of a multilayer wiring board, thin film sheet with bump and anisotropic conductive rubber and a system that a multilayer wiring board and a probe terminal are provided, the probe terminal has a structure in which a copper post is provided through a resin sheet and when the pressure is applied, this copper post is crushed and thereby unequal height of electrodes is equalized.

SUMMARY OF THE INVENTION

[0006] The inventors of the present invention have discussed the technique of the burn-in test explained above and proved following contents.

[0007] For example, the semiconductor integrated circuit device test technique includes the burn-in test for screening a chip that may change to a defective chip by applying temperature and voltage stresses under the higher temperature atmosphere, the function test to check whether a device operates as specified in the predetermined function and the probe test for determining good/no-good products by executing the test for the DC operation characteristic and AC operation characteristic.

[0008] In recent years, in the burn-in test of a semiconductor integrated circuit device, the wafer level burn-in technique to conduct the burn-in test in the wafer condition has been utilized from the requirement for coverage of the wafer delivery (discrimination of quality) and KGD (Known Good Die) (improvement of yield of MCP (Multi-Chip Package) and for relief of no-good product for burn-in, feed-back of test data of no-good product for burn-in and reduction of total cost or the like.

[0009] In this wafer level burn-in, it is essential to solve the technical problems such as the pushing mechanism to realize equal pressurizing to the entire surface of a wafer, wafer heating and temperature control mechanism, requirement for probe of ten thousands or more pins for the entire surface of wafer, absorption of warp and waving of wafer and unequal heights of probe, dependence on thermal expansion coefficient under the higher temperature, layout of many wires, necessity for focusing of input signals, requirement for probe alignment to the entire surface of wafer, disconnection of defective chip and cut-off of over-current and contact check for the entire surface of wafer.

[0010] As the technique in regard to the burn-in test to solve such technical problems, there has been proposed, for example, the technique described in the “NIKKEI MICRO-DEVICE, January 2000”. However, this technique is assumed to include various problems that a film forming apparatus to eliminate a defective chip is required in the system utilizing the TPS probe described in the above reference, the wafer level burn-in may be executed only in the last stage of probe test and laser relief, a contact resistance of a thin film sheet with bump may be increased easily depending on the number of times of contact, moreover a partial repair is impossible in the integrated structure and operation life of anisotropic conductive rubber is rather short.

[0011] Moreover, in the system utilizing the technique including the multilayer wiring board and probe terminal described in the reference “NIKKEI MICRODEVICE, January 2000”, there is assumed a problem that a resin sheet is used only for a gold pad and this sheet is thrown away after it is once used.

[0012] It is an object of the present invention to provide a method of fabricating a semiconductor integrated circuit device and a method of testing the same device for realizing reduction in cost by introducing the divided contactor integrating system, for example, in the burn-in test and probe test, particularly in the wafer level burn-in, realizing uniform contact of the divided contactors to the entire surface of wafer, enabling the repair for each divided contactor and reducing the manufacturing cost through improvement of the yield of divided contactors.

[0013] The above and the other objects and the novel features of the present invention will become apparent from the following description of this specification and the accompanying drawings.

[0014] The typical inventions among those disclosed in this specification will be briefly explained below.

[0015] (1) A testing apparatus of a semiconductor integrated circuit device comprising following structural elements:

[0016] (a) a plurality of test styluses used to conduct electric test in contact with a plurality of terminals provided on the first main plane of wafer on which a plurality of semiconductor integrated circuit devices are formed;

[0017] (b) a single layer or multiple layers of the first wiring layer connected to a plurality of the test styluses; and

[0018] (c) a plurality of wiring/stylus composite plates wherein a plurality of the test styluses are held in the manner that each tip thereof is projected toward the first main plane side and the first wiring layer is included respectively in each plate.

[0019] (2) In the testing apparatus of the semiconductor integrated circuit device of item (1), each plate of a plurality of wiring/stylus composite plates allocates the test styluses to measure a plurality of chip regions formed on the first main plane of the wafer.

[0020] (3) In the testing apparatus of the semiconductor integrated circuit device of item (2), a plurality of terminals of the first chip region in a plurality of chip regions formed on the first main plane of the wafer are allocated to measure in contact with both test styluses of the first and second wiring/stylus composite plates among a plurality of wiring/stylus composite plates.

[0021] (4) In the testing apparatus of the semiconductor integrated circuit device of item (3), the number of wiring/stylus composite plates is 4 or more.

[0022] (5) In the testing apparatus of the semiconductor integrated circuit device of item (3), the number of wiring/stylus composite plates is 9 or more.

[0023] (6) In the testing apparatus of the semiconductor integrated circuit device of item (5), the number of chip regions to be measured with each plate among a plurality of wiring/stylus composite plates is 9 or more.

[0024] (7) In the testing apparatus of the semiconductor integrated circuit device of item (5), the number of chip regions to be measured with each plate among a plurality of wiring/stylus composite plates is 16 or more.

[0025] (8) In the testing apparatus of the semiconductor integrated circuit device of item (7), a plurality of the wiring/stylus composite plates includes a plate member mainly composed of silicon as the main structural element.

[0026] (9) In the testing apparatus of the semiconductor integrated circuit device of item (8), the wafer includes a plate member mainly composed of silicon as the main structural element.

[0027] (10) In the testing apparatus of the semiconductor integrated circuit device of item (9), the electric test is the burn-in test.

[0028] (11) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0029] (a) preparing for a plurality of test styluses used to conduct electric test in contact with a plurality of terminals provided on the first main plane of wafer on which a plurality of semiconductor integrated circuit devices are formed, a single layer or multiple layers of the first wiring layer connected to a plurality of the test styluses, and a plurality of wiring/stylus composite plates wherein a plurality of the test styluses are held in the manner that each end point thereof is projected toward the first main plane side and the first wiring layer is included respectively in each plate; and

[0030] (b) conducting an electric test of a plurality of chip regions with a plurality of test styluses of each plate among a plurality of wiring/stylus composite plates in contact with a plurality of terminals of the plurality of chip regions formed on the first main plane of the wafer.

[0031] (12) In the method of fabricating the semiconductor integrated circuit device of item (11), the electric test is the burn-in test.

[0032] (13) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0033] (a) preparing for a plurality of test styluses used to conduct electric test in contact with a plurality of terminals provided on the first main plane of wafer on which a plurality of semiconductor integrated circuit devices are formed, a single layer or multiple layers of the first wiring layer connected to a plurality of the test styluses, and a plurality of wiring/stylus composite plates wherein a plurality of the test styluses are held in the manner that each end point thereof is projected toward the first main plane side and the first wiring layer is included respectively in each plate; and

[0034] (b) conducting an electric test by bringing a plurality of styluses of both first and second wiring/stylus composite plates among a plurality of wiring/stylus composite plates into contact with a plurality of terminals of the first chip region among a plurality of chip regions formed on the first main plane of the wafer.

[0035] (14) In the method of fabricating the semiconductor integrated circuit device of item (13), the electric test is the burn-in test.

[0036] (15) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0037] (a) preparing for a plurality of test styluses used to conduct electric test in contact with a plurality of terminals provided on the first main plane of wafer on which a plurality of semiconductor integrated circuit devices are formed, a single layer or multiple layers of the first wiring layer connected to a plurality of the test styluses, and a plurality of wiring/stylus composite plates wherein a plurality of the test styluses are held in the manner that each end point thereof is projected toward the first main plane side and the first wiring layer is included respectively in each plate; and

[0038] (b) conducting an electric test for a plurality of chip regions by bringing a plurality of test styluses of each plate among a plurality of wiring/stylus composite plates into contact with a plurality of terminals of a plurality of chip regions including a BIST circuit formed on the first main plane of the wafer.

[0039] (16) In the method of fabricating the semiconductor integrated circuit device in item (15), the electric test is the burn-in test.

[0040] (17) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0041] (a) preparing for a plurality of test styluses used to conduct electric test in contact with a plurality of terminals provided on the first main plane of wafer on which a plurality of semiconductor integrated circuit devices are formed, a single layer or multiple layers of the first wiring layer connected to a plurality of the test styluses, and a plurality of wiring/stylus composite plates wherein a plurality of the test styluses are held in the manner that each end point thereof is projected toward the first main plane side and the first wiring layer is included respectively in each plate; and

[0042] (b) conducting an electric test for a plurality of chip regions by bringing a plurality of test styluses of each plate among a plurality of wiring/stylus composite plates into contact, under the vacuum or evacuated condition, with a plurality of terminals of a plurality of chip regions formed on the first main plane of the wafer.

[0043] (18) In the method of fabricating the semiconductor integrated circuit device of item (17), the electric test is the burn-in test.

[0044] (19) There is provided a wiring/stylus composite plate on which a plurality of test styluses are provided and the plate is divided into a plurality of regions for a sheet of test wafer.

[0045] (20) In the testing apparatus of the semiconductor integrated circuit device of item (19), guide frames are provided to integrate the divided wiring/stylus composite plate and the wiring/stylus composite plate integrated with one guide frame forms an integrated contactor on the entire surface of one wafer corresponding to a sheet of test wafer (hereinafter referred to as test wafer).

[0046] (21) In the testing apparatus of semiconductor integrated circuit device of item (20), the divided wiring/stylus composite plate is formed of the material of the same thermal expansion coefficient as that of the test wafer.

[0047] (22) In the testing apparatus of semiconductor integrated circuit device of item (21), the test wafer is formed of a silicon substrate and the divided wiring/stylus composite plate is composed of a silicon substrate.

[0048] (23) In the testing apparatus of the semiconductor integrated circuit device of item (21), the test wafer is formed of a silicon substrate and the divided wiring/stylus composite plate is formed of a silicon membrane sheet.

[0049] (24) In the testing apparatus of the semiconductor integrated circuit device of item (20), the guide frame is formed of a material having the thermal expansion coefficient that is approximated to that of the test wafer.

[0050] (25) In the testing apparatus of the semiconductor integrated circuit device of item (24), the test wafer is formed of a silicon substrate and the guide frame is formed of 42 alloy or nickel alloy.

[0051] (26) In the testing apparatus of the semiconductor integrated circuit device of item (20), a plurality of probes of the divided wiring/stylus composite plate are respectively formed in the pyramidal shape with the micro-machining technique such as the anisotropic etching process.

[0052] (27) In the testing apparatus of the semiconductor integrated circuit device of item (26), the probes of the wiring/stylus composite plate may respectively be deformed at the periphery thereof with pressure.

[0053] (28) In the testing apparatus of the semiconductor integrated circuit device of item (27), the periphery of each probe of the wiring/stylus composite plate may be deformed with a mechanical pressurizing system and the probe is brought into electrical contact, under the deformed condition, with each test pad of each chip of the test wafer in the predetermined pressure.

[0054] (29) In the testing apparatus of the semiconductor integrated circuit device of item (27), the periphery of each probe of the wiring/stylus composite plate may be deformed with a vacuum or evacuation pressurizing system and each probe is electrically brought into contact, in the deformed condition, with each testing pad of the test wafer.

[0055] (30) In the testing apparatus of the semiconductor integrated circuit device of item (20), the divided areas of the divided wiring/stylus composite plate are deviated in the position from the scribe area of each chip of the test wafer.

[0056] (31) In the testing apparatus of the semiconductor integrated circuit device of item (20), the respective plates of the divided wiring/stylus composite plate correspond to a plurality of chip units of the test wafer.

[0057] (32) In the testing apparatus of the semiconductor integrated circuit device of item (20), the respective plates of the divided wiring/stylus composite plate may be repaired individually.

[0058] (33) In the testing apparatus of the semiconductor integrated circuit device of item (20), the divided wiring/stylus composite plates respectively have the positioning marks.

[0059] (34) In the testing apparatus of the semiconductor integrated circuit device of item (20), the respective chips of the test wafer have the BIST circuit.

[0060] (35) In the testing apparatus of the semiconductor integrated circuit device of item (34), a plurality of testing pads on the chip hold the other pads and are allocated separately in the periphery.

[0061] (36) In the testing apparatus of the semiconductor integrated circuit device of item (19), there are comprised a plurality of divided wiring/stylus composite plates, a guide frame for integrating the divided wiring/stylus composite plates, a multilayer wiring substrate electrically connected to the divided wiring/stylus composite plates, an elastomer for absorbing fluctuation of probe heights of the divided wiring/stylus composite plates and an upper cover and a lower cover for packing, by holding from the upper and lower sides, the test wafer via the wiring/stylus composite plates, guide frame, multilayer wiring substrate and elastomer.

[0062] (37) In the testing apparatus of the semiconductor integrated circuit device of item (36), there is comprised a burn-in substrate that is electrically connected to the multilayer wiring substrate to execute the burn-in test for the test wafer.

[0063] (38) In the testing apparatus of the semiconductor integrated circuit device of item (36), the guide frame, elastomer and upper and lower covers are positioned with a positioning mechanism.

[0064] (39) In the testing apparatus of the semiconductor integrated circuit device of item (36), the multilayer wiring substrate has a structure to lay many wirings and focuses the input signal.

[0065] (40) In the testing apparatus of the semiconductor integrated circuit device of item (36), the multiple wiring substrate is provided with protection resistor and capacitor.

[0066] (41) In the testing apparatus of the semiconductor integrated circuit device of item (36) the upper cover and lower cover are provided with a vacuum or evacuation absorbing mechanism to equalize warp and wave of the test wafer.

[0067] (42) In the testing apparatus of the semiconductor integrated circuit device of stem (36), the upper cover and lower cover are provided with a temperature control mechanism for controlling temperature condition of the test wafer.

[0068] (43) In the testing apparatus of the semiconductor integrated circuit device of item (37), the burn-in substrate is provided with an over-current cut-off circuit.

[0069] (43) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0070] preparing for a wiring/stylus composite plate that is provided with a plurality of test styluses and divided into a plurality of plates for a sheet of test wafer; and

[0071] testing the electrical characteristics of each chip by integrating the divided wiring/stylus composite plates with a guide frame and bringing each probe of each wiring/stylus composite plate integrated with the guide frame into electrical contact with each testing pad of each chip of a sheet of test wafer.

[0072] (45) In the method of fabricating the semiconductor integrated circuit device of item (44), the step of testing the electrical characteristics is the burn-in test process.

[0073] (46) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0074] preparing for a wiring/stylus composite plate that is provided with a plurality of test styluses and divided into a plurality of plates for a sheet of test wafer with this dividing line deviated in position from the scribe line for each chip of the test wafer; and

[0075] testing the electrical characteristics of each chip by integrating the divided wiring/stylus composite plates with a guide frame and bringing each probe of each wiring/stylus composite plate integrated with the guide frame into electrical contact with each testing pad of each chip of a sheet of test wafer.

[0076] (47) In the method of fabricating the semiconductor integrated circuit device of item (46), the step of testing the electrical characteristic is the burn-in test process.

[0077] (48) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0078] preparing for a wiring/stylus composite plate that is provided with a plurality of test styluses and is divided into a plurality of plates for a sheet of test wafer; and

[0079] testing the electrical characteristics of each chip by integrating the divided wiring/stylus composite plates with a guide frame and bringing each probe of each wiring/stylus composite plate integrated with the guide frame into electrical contact with each testing pad of each chip including the BIST circuit of a sheet of test wafer.

[0080] (49) In the method of fabricating the semiconductor integrated circuit device of item (48), the step of testing the electrical characteristic is the burn-in test process.

[0081] (50) A method of fabricating a semiconductor integrated circuit device comprising the steps of:

[0082] preparing for a wiring/stylus composite plate that is provided with a plurality of test styluses and is divided into a plurality of plates for a sheet of test wafer; and

[0083] testing the electrical characteristics of each chip by integrating the divided wiring/stylus composite plates with a guide frame and bringing each probe of each wiring/stylus composite plate integrated with the guide frame into electrical contact with each testing pad of each chip of a sheet of test wafer under the vacuum or evacuated condition.

[0084] (51) In the method of fabricating the semiconductor integrated circuit device of item (50), the step of testing the electrical characteristic is the burn-in test process.

[0085] Therefore, the testing apparatus and the method of fabricating the semiconductor integrated circuit device provide the following effects.

[0086] (1) The wiring/stylus composite plate is reduced by dividing into a plurality of plates for a sheet of test wafer by providing a plurality of divided wiring/stylus composite plates and then forming a full wafer surface simultaneous contactor through integration of these divided wiring/stylus composite plates with one guide frame. Thereby, fabrication becomes as much easier and fabrication yield is enhanced. As a result, fabrication cost can be reduced.

[0087] Moreover, since the divided wiring/stylus composite plates are free from the size of test wafer, the existing facilities may be used also for the wafer of large size. Thereby, the fabrication cost of contactor by the full wafer surface simultaneous contactor system can be reduced.

[0088] In addition, the divided wiring/stylus composite plates can individually move when these are integrated with the guide frame. These plates can therefore independently equalize the warp and wave of the test wafer.

[0089] (2) Since the fabrication facilities of LSI may be used and fine processing accuracy such as that of the LSI fabrication is not required by forming the divided wiring/stylus composite plates with the material having the thermal expansion coefficient same as that of the test wafer, the existing facilities for fabrication of LSI may be used as the facilities for fabricating the wiring/stylus composite plate and thereby the fabrication cost can be reduced.

[0090] Moreover, since the test wafer and silicon contactor show the similar thermal expansion even for the temperature condition of burn-in process, sufficient probe alignment accuracy for the full surface of wafer can be obtained.

[0091] (3) Since the guide frame also has the thermal expansion coefficient similar to that of the test wafer by forming the guide frame with a material having the thermal expansion coefficient similar to that of the test wafer, the probe alignment to the full surface of wafer can be controlled within the allowable range.

[0092] (4) The probe can be formed in the pyramidal shape corresponding to employment of multi-pin structure or narrow-in structure by forming the probe of the divided wiring/stylus composite plates with the micro-machining technique such as the anisotropic etching or the like.

[0093] (5) The probe can be equally brought into contact with the test wafer in the predetermined pressure by deforming the surrounding of the probe of the divided wiring/stylus composite plates with a mechanical pressurizing system or a vacuum or evacuation pressurizing system.

[0094] (6) A large size guide frame for integrating the wiring/stylus composite plates can be attained, without relation to the trend to reduce the scribe area of the test wafer, by deviating the dividing area of the divided wiring/stylus composite plates from the scribe area of each chip of the test wafer.

[0095] Moreover, the scribe area tends to be reduced to improve the number of chips to be obtained of the test wafer but such tendency can be covered without any problem.

[0096] In addition, since the size and cutting accuracy of the divided wiring/stylus composite plates is not restricted with the scribe area, the degree of freedom for design can be much improved.

[0097] (7) Since the wiring/stylus composite plate may be set to a certain size against the trend to reduce the size of chip by providing the divided wiring/stylus composite plates depending on the unit of a plurality of chips of the test wafer, each wiring/stylus composite plate may be fabricated easily.

[0098] (8) Since a fault of burn-in cassette in the fabrication process can be recovered easily and moreover a fault during use in the mass-production line can also be repaired in unit of each wiring/stylus composite plate by individually repairing the divided wiring/stylus composite plates, the fabrication cost and maintenance cost can also be reduced.

[0099] (9) Since each divided wiring/stylus composite plate has a positioning mark, assembling for integrating the wiring/stylus composite plates with the guide frame can done easily.

[0100] (10) Since each chip of the test wafer has a BIST circuit, a test pattern can be generated within each chip. Thereby, the number of test pads of each chip can be reduced and allocation of test pad can be optimized.

[0101] Moreover, since the number of probes of the divided wiring/stylus composite plates can be minimized, allocation of probe can also be optimized.

[0102] (11) Since the test pads can be allocated keeping a certain interval for the narrow pitch structure by holding the test pads on each chip with the other pads and allocating these test pads in isolation in the peripheral area, influence on the fabrication of wiring/stylus composite plate can also be minimized.

[0103] (12) The wafer full surface simultaneous contact system based on the divided contactor integration type can be structured as a cassette structure by realizing the packing the test wafer with the upper and lower covers from the upper and lower directions via the divided wiring/stylus composite plates, guide frame, multilayer wiring substrate and elastomer.

[0104] (13) The burn-in substrate can be connected easily to the cassette structure testing apparatus by comprising the burn-in substrate connected to the multilayer wiring substrate.

[0105] (14) Since the guide frame, elastomer, upper and lower covers can be positioned easily by giving the positioning mechanism to these elements, the cassette structure testing apparatus can be assembled easily.

[0106] (15) Since the input/output signals between the wiring/stylus composite plate and burn-in substrate can be inputted or outputted together because the multilayer wiring substrate has the structure to lay many wirings and gather the input signals, the number of signal lines between the multilayer wiring substrate and burn-in substrate can be reduced and this signal line may be laid easily.

[0107] (16) Malfunction due to variation of power supply voltage and noise can be prevented by mounting protection resistor and capacitor on the multilayer wiring substrate.

[0108] (17) The test wafer is attracted with the flat surface of the lower cover and thereby warp and wave of the test wafer can be equalized by providing the vacuum or evacuation attracting mechanism to the upper and lower covers.

[0109] (18) Since the test wafer can be heated up to the predetermined temperature by providing a temperature control mechanism to the upper and lower covers, the temperature condition of the test wafer can be controlled.

[0110] (19) Since an over current of each chip of the test wafer can be cut off by providing an over current cut-off circuit to the burn-in substrate, damage and breakdown of the integrated circuit and wiring/stylus composite plate formed on each chip can be prevented by isolating a defective chip and controlling generation of latch-up.

BRIEF DESCRIPTION OF THE DRAWINGS

[0111]FIG. 1 is a flowchart indicating a method of fabricating a semiconductor integrated circuit device as an embodiment of the present invention.

[0112]FIG. 2 is a structural diagram indicating a wafer level burn-in cassette of the mechanical pressurizing system in the testing apparatus to execute the burn-in in an embodiment of the present invention.

[0113]FIG. 3 is a structural diagram indicating a silicon contactor block in the testing apparatus to execute the burn-in in an embodiment of the present invention.

[0114] FIGS. 4(a), 4(b), 4(c) are plan view and enlarged cross-sectional views indicating the essential portion of the silicon contactor in the testing apparatus to execute wafer level burn-in as an embodiment of the present invention.

[0115]FIG. 5 is a cross-sectional view indicating the essential portion of the wafer level burn-in cassette in the testing apparatus to execute wafer level burn-in in an embodiment of the present invention.

[0116]FIG. 6 is a structural diagram indicating the wafer level burn-in of the vacuum pressurizing system in the testing apparatus to execute wafer level burn-in as an embodiment of the present invention.

[0117]FIG. 7 is a schematic block diagram indicating each chip of the test wafer in wafer level burn-in as an embodiment of the present invention.

[0118]FIG. 8 is a explanatory diagram indicating a silicon contactor in wafer level burn-in as an embodiment of the present invention.

[0119]FIG. 9 is an explanatory diagram indicating the relationship between silicon contactor and chip in wafer level burn-in as an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0120] In the description of the preferred embodiments, the same and similar explanation will be never repeated as a rule unless otherwise required particularly.

[0121] Moreover, in the description of preferred embodiments, explanation will be made through a plurality of sections or embodiments when explanation is required but, these are always related, unless otherwise declared clearly, and one is a part of the other or in the relation of the total modification example or in the relation of the detail or complementary explanation.

[0122] In addition, when the explanation refers to the number of elements (including quantity, numerical value, amount and range) in the description of the referred embodiments, the explanation is never limited to the particular number or quantity and may be the particular number of quantity or more or less, unless otherwise described particularly and except for the case where the particular number is defined in principle.

[0123] Moreover, in the description of the preferred embodiments, the structural elements (including element step or the like) are not always essential, unless otherwise described clearly or except for the case where the elements are considered as the essential elements in principle.

[0124] In the same manner, when the explanation refers to the shape and positional relationship of the structural elements in the description of the preferred embodiments, those similar to such shape or the like are substantially included, unless otherwise described clearly or except for the case where these are clearly denied in principle.

[0125] The preferred embodiments of the present invention will be explained in detail with reference to the accompanying drawings. The like elements of the like functions are designated with the like reference numerals throughout the accompanying drawings prepared for the explanation of embodiments and the same explanation is never repeated.

[0126] (1) A semiconductor integrated circuit device in this specification shall includes the devices not only those formed on a silicon wafer but also those formed on the other substrate such as TFT liquid crystal, except for those clearly denied.

[0127] (2) A wafer in this specification shall includes an almost disc type or rectangular silicon single crystal wafer used for fabrication of semiconductor integrated circuit device, SOI, those having a composite structure with the other insulator and glass substrate used for fabrication of TFT.

[0128] (3) A wiring/stylus composite plate in this specification shall include those integrally forming the wiring layer and the test styluses having the tips connected to such layer with the wafer process, namely the patterning method combining the lithography, CVD, sputter and etching which is similar to the method to use the silicon wafer into fabrication of a semiconductor integrated circuit device and those integrating the printed wirings and styluses on a polyimide film and the other sheet type insulation film.

[0129] (4) A test stylus or only a stylus in this specification shall include those having the tip of the traditional probe stylus, contact terminals like a stylus having the narrow tip and a bump electrode of the other shape or the like.

[0130] (5) The “number of chip regions to which the wiring/stylus composite plate corresponds” shall include those corresponding to the entire part thereof and those corresponding only to a part of the terminals.

[0131] First, an example of the method of fabricating the semiconductor integrated circuit device of the preferred embodiments will be explained. FIG. 1 is a flowchart indicating a method of fabricating a semiconductor integrated circuit device. As this semiconductor integrated circuit device, an SRAM will be explained as an example, but the present invention can naturally be applied to a memory LSI such as DRAM and flash memory and a logic LSI or the like.

[0132] (1) In the preprocessing step (step S1), many elements are formed on a semiconductor wafer. That is, in this step, the desired integrated circuit is formed, based on the specifications of SRAM, on a semiconductor wafer, for example, consisting of a silicon substrate by repeating each wafer processing step such as oxidation, diffusion, impurity introduction, formation of wiring pattern, formation of insulation layer and formation of wiring layer or the like.

[0133] (2) In the wafer level burn-in step (step S2), the semiconductor wafer on which many elements are formed is placed in the burn-in test (thermal load test). That is, in this step, a chip having possibility for future fault is subjected to the screening by applying, in order to generate a current to the integrated circuit, the rated power supply voltage or the voltage exceeding the rating to the semiconductor wafer under the high temperature atmosphere (for example, 125 to 150° C.) in view of giving thereto the temperature and voltage stress. In this wafer level burn-in step, the testing apparatus of the wafer full surface simultaneous contact system based on the divided contactor integration type explained later is used.

[0134] (3) In the first trial of the probe test step (step S3), the semiconductor wafer on which many elements are formed is probe-tested (continuity test). That is, in this step, the function test to confirm whether the predetermined function is attained or not by testing the memory function with the write and read operation to and from SRAM using the predetermined test pattern, the DC test such as the open/short test between the input and output terminals, leak current test and measurement of power supply current and the AC test for testing the AC timing of the memory control are conducted. Here, it is possible, in the first probe test step and the second probe test step that will be explained later, to use the testing apparatus of the wafer full surface simultaneous contact system based on the divided contactor integration type which will be explained later.

[0135] (4) In the laser relief step (step S4), a defective element that is determined with the probe test is irradiated with the laser beam for the purpose of relief. That is, in this step, defective bit of SRAM is found by analyzing the result of probe test, a fuse of this redundant relief bit corresponding to this defective bit is disconnected with the laser beam to conduct the repair through the redundant relief process.

[0136] (5) In the second probe test step (step S5), the semiconductor wafer is placed again in the probe test (continuity test) after the laser relief. Namely, in this step, the test similar to the first probe test is conducted to check that defective bit is switched to the bit for redundant relief with the redundant relief process.

[0137] (6) In the wafer delivery step (step S6), good semiconductor wafers are delivered in direct as the products based on the result of the probe test after the laser relief. That is, in this step, the semiconductor wafer on which a plurality of chips of SRAM are mounted is provided for user under the condition of this semiconductor wafer.

[0138] (7) In the MCP assembly step (step S7), a good semiconductor wafer is diced to obtain discrete chips and these chips are combined to form a package structure. That is, in this step, the chips of SRAM fabricated through respective steps and the chips, for example, of flash memory fabricated after completion up to the dicing step from the pre-processing step are mounted to form the MCP.

[0139] In practical, the die bonding step for mounting the SRAM chips and flash memory chips on the substrate, wire bonding step for electrically connecting the pad of each chip and the pad on the substrate with wires, resin mold step for molding each chip and wire portions with resin for protection thereof and lead forming step for forming an external lead and processing the surface thereof are carried out. Here, a flip chip bonding step is also possible, in addition to the wire bonding step.

[0140] (8) In the tester selection step (step S8), the assembled MCP is selected with a tester. Namely, in this step, the test, for example, similar to the probe test of the semiconductor wafer is conducted to select good/no-good product of this MCP is selected. Thereby, only the good MCP is delivered as a product to users.

[0141] Next, an example of the testing apparatus to conduct the wafer level burn-in explained above will be explained with reference to FIG. 2 to FIG. 6. FIG. 2 to FIG. 5 show the testing apparatus of the mechanical pressurizing system. FIG. 2 is a structural diagram showing the wafer level burn-in cassette of the mechanical pressurizing system of the essential portion of the testing apparatus. FIG. 3 is a structural diagram showing the silicon contactor block. FIG. 4(a) is a plan view showing the essential portion of the silicon contactor. FIG. 4(b) is a cross-sectional view along the line a-a′ of FIG. 4(a). FIG. 4(c) is a cross-sectional view of the deformation of FIG. 4(b). FIG. 5 is a cross-sectional view showing the essential portion of the wafer level burn-in cassette. FIG. 6 is a structural diagram showing the wafer level burn-in cassette of the vacuum pressurizing system of the essential portion of the testing apparatus.

[0142] The testing apparatus of the mechanical pressurizing system for conducting the wafer level burn-in is composed of a plurality of divided silicon contactor blocks having the cassette structure, for example, as shown in FIG. 2, a guide frame 2 for integrating these silicon contactor blocks 1, an elastomer 3 for absorbing height fluctuation of probe of the silicon contactor block 1 and upper and lower covers 5, 6 for packing the test wafer 4 from the upper and lower directions. On the upper part of this wafer level burn-in cassette, a burn-in substrate 7 that is electrically connected to the multilayer wiring substrate of the silicon contactor block 1 for burn-in test of the test wafer 4 is provided.

[0143] Since this wafer level burn-in cassette introduces the divided contactor integration type system, repair can be executed for every divided silicon contactor block 1 to thereby realize reduction in cost. For instance, one silicon contactor block 1 realizes the number of blocks=6 pins×36=216 pins (6 pins/chip) when the number of chips obtained is 36 (9 chips×4 columns).

[0144] In this wafer level burn-in cassette, 22 silicon contactor blocks 1, for example, are required for a sheet of test wafer 4 in the full surface of wafer depending on the number of chips obtained of the test wafer 4.

[0145] Each silicon contactor block 1 is composed, for example, as shown in FIG. 3, of a silicon contactor (wiring/stylus composite plate) 11 provided with a plurality of test styluses, a ceramic substrate (multilayer wiring substrate) 12 electrically connected to the silicon contactor 11, an AFC (Anisotropic Conductive Film) 13 for bonding the silicon contactor 11 and ceramic substrate 12, a connector 14 for electrically connecting the ceramic substrate 12 and burn-in substrate 7 and a cover 15 covering these elements from the upper part. The connector 14 is connected with an FPC (Flexible Printed Circuit) cable 16 for electrical connection to the burn-in substrate 7.

[0146] A silicon contactor 11 of each silicon contactor block 1 is provided as a member for contact with a plurality of chips of the test wafer 4 and is formed, for example, of a material having the thermal expansion coefficient identical to that of the test wafer 4. At the surface of this silicon contactor 11 (lower side in FIG. 3), a probe (test stylus) 17 and a plurality of (for example, number of probes of 216 pins corresponding to 36 chips) probe sections (test stylus sections) consisting of the beam 18 supporting this probe 17 are provided as shown in FIG. 4(a). Each probe 17 is formed in a projected shape to be set in contact electrically with the test pad of each chip of the test wafer 4 and is also formed in the pyramidal shape with the micro-machining technique such as the anisotropic etching. Moreover, the beam 18 portion in the periphery of the probe 17 may be deformed with the pressure of the mechanical pressurizing system, for example, as shown in FIG. 4(c) from the condition of FIG. 4(b). In this deformed condition, the probe 17 is placed equally in contact with the test pad of each chip of the test wafer 4 in the predetermined pressure.

[0147] On both front surface and rear surface of the silicon contactor 11, a wiring layer consisting of combination of Au, Cu, Ni, Rh and Pd obtained through the plating is formed and the wiring patterns of wiring layers at the front and rear surfaces are electrically connected via the through hole. For example, as shown in FIG. 4, the projected portion of probe 11 of the silicon contactor 11 is electrically connected to the pad 36 via the wiring patterns 33, 33 a of the wiring layer at the front surface, through hole 34 provided through the rear surface from the front surface and the wiring patterns 35, 35 a of the wiring layer at the rear surface. The front surface of this silicon contactor 11 is covered with an insulation film 37 in the manner that the projected portion of the probe 17 is exposed. Here, the wiring patterns 33, 33 a, 35, 35 a of the front and rear surfaces are laid, for example, as shown in FIG. 4(a) in the manner that the wiring patterns 33 a, 35 a of the power supply and ground line are formed in the thick width in comparison with the wiring patterns 33, 35 of the signal line. Moreover, as shown in FIG. 4(b), in the wiring patterns 33(33 a), 35(35 a) of the front and rear surfaces, the projected portion of probe 17 is formed by the thinner plating, while the other portion is formed by the thicker plating to reduce a resistance value.

[0148] The ceramic substrate 12 is the substrate member of the multilayer wiring structure consisting of the ceramic base material having the structure that many wirings are laid corresponding to a plurality of chips (for example, 32 chips) of one silicon contactor 1 and the input signals from a plurality of chips can be focused (for example, {fraction (1/10)}). Moreover, as shown in FIG. 3, a chip resistor 19 and a chip capacitor 20 for protection from variation of power supply and noise are mounted on the surface of ceramic substrate 12 (upper side in FIG. 3) and a connector 14 can also be mounted additionally. This ceramic substrate 12 is electrically connected to the pad on the rear surface via the wiring pattern and through hole from a land (not shown) on which a chip resistor 19, a chip capacitor 20 and a connector 14 or the like are mounted. The pad at the rear surface of this ceramic substrate 12 is electrically connected to the pad 36 of the silicon contactor 11 via the ACF 13 bonded on the rear surface of the ceramic substrate 12 and thereby the electrical connection is made to the burn-in substrate 7 from the probe 17 of the silicon contactor 11 via the ceramic substrate 12, connector 14 and FPC cable 16.

[0149] The cover 15 is a member covering the silicon contactor block 1 to play a role of reinforcement when it is bonded on the ceramic substrate 12. In this cover 15, a through hole 21 of the FPC cable 16 connected to the connector 14 of the ceramic substrate 12 is formed as shown in FIG. 3 and moreover an escaping space (not shown) of the chip resistor 19 and chip capacitor 20 is also formed therein. In addition, the cover 15 is also provided with a threaded hole 22 and thereby the positioning is performed with an hanging screw (positioning mechanism) 23 that is engaged with the threaded hole 22 of the cover 15 from the upper part of the upper cover 5 via the elastomer 3 under the condition that this cover 15 and ceramic substrate 12, ACF 13 and silicon contactor 11 are bonded for integration).

[0150] The guide frame 2 of the wafer level burn-in cassette is a member for integrating the divided silicon contactor blocks 1 and fixing the position in the horizontal direction and is formed of a material, for example, 42 alloy or nickel alloy having the thermal expansion coefficient similar to that of the test wafer 4. As shown in FIG. 2, for example, each divided silicon contactor block 1 is positioned within each frame partitioned into a plurality of sub-frames of the guide frame 2 and these blocks 1 are accommodated in the condition to independently move in the upper and lower directions. Thereby, the wafer full surface simultaneous contact system based on the divided contactor integration may be realized.

[0151] The elastomer 3 is a member for absorbing fluctuation of height of probes of the silicon contactor block 1 and is formed of a polymer material such as silicon rubber. With this elastomer 3, the silicon contactor block 1 integrated with the guide frame 2 can independently move and therefore fluctuation of height of probe 11 of each silicon contactor 11 may be obsorbed.

[0152] The upper cover 5 and lower cover 6 are members for packing the wafer level burn-in cassette from the upper and lower directions and are formed, for example, of SUS or aluminum. As shown in FIG. 2, for example, these upper cover 5 and lower cover 6 hold the test wafer 4 and pack to the upper part of the test wafer 4 from the upper and lower directions via the silicon contactor block 1 integrated to the guide frame 2 and elastomer 3. These upper cover 5 and lower cover 6 may be positioned with a fixing screw (positioning mechanism) 4 that is inserted from the upper part of the upper cover 5 and is engaged with the lower cover 6. Moreover, the internal side surface of the lower cover 6 is flat and is provided with a vacuum absorbing mechanism consisting of a vacuum holding hole 25, a vacuum holding groove 26 and a micro-coupler 28 for absorbing warp and wave of the test wafer 4 for equalizing these factors and a temperature control mechanism consisting of a surface heater 29 to control the temperature condition, a temperature sensor 30, a contact 31 and a connector 32 or the like.

[0153] The burn-in substrate 7 is connected to each ceramic substrate 12 of the silicon contactor block 1 and is also connected to the burn-in apparatus not shown. In the burn-in test, a test control signal is supplied from the burn-in apparatus and the test is conducted by obtaining a test result signal. Moreover, the burn-in substrate 7 is provided with an over-current cut-off circuit (not illustrated) to cut off an over-current of each chip of the test wafer 4 and control disconnection of defective chip and generation of latch-up.

[0154] In the case of conducting the wafer level burn-in using the testing apparatus of the mechanical pressurizing system as explained above, each silicon contactor block 1 which individually moves is mechanically pressurized under the condition that the silicon contactor block 1, elastomer 3 and test wafer 4 integrated to the guide frame 2 are packed with the upper cover 5 and lower cover 6 of the wafer level burn-in cassette and each probe 17 of this silicon contactor 11 is placed in contact with the test pas of each chip of the test wafer 4 in the predetermined pressure. Thereafter, the screening of chips having possibility for a fault to be generated in future can be realized by supplying a test control signal of the wafer level burn-in to each chip of the test wafer 4 from the burn-in apparatus via the burn-in substrate 7 and each ceramic substrate 12 and then obtaining the test result signal from each chip of the test wafer 4 with the burn-in apparatus via the ceramic substrate 12 and burn-in substrate 7.

[0155] In this case, in the wafer level burn-in cassette, the test wafer 4 is absorbed with the lower cover 6 for elimination of warp and wave with the vacuum absorbing mechanism consisting of a vacuum holding hole 25, a vacuum holding groove 26 and micro-coupler 28. Thereafter, the wafer 4 is packed through the mechanical pressurization and moreover with connection of the contact 31 provided to the upper cover 5 and the connector 32 provided to the lower cover 6, the temperature control mechanism consisting of the surface heater 29 and temperature sensor 30 operates to control the temperature condition of the test wafer 4. In addition, the sufficient alignment accuracy between the each probe 17 of the silicon contactor 11 and each test pad of each chip of the test wafer 4 can also be obtained because the test wafer 4 and silicon contactor 11 show the similar thermal expansion coefficient and the guide frame 2 also shows the thermal expansion coefficient similar to that of the test wafer 4 even for the high temperature condition during the wafer level burn-in process.

[0156] Moreover, the testing apparatus of the vacuum pressurizing system does not have the block structure of the silicon contactor unlike the testing apparatus but the structure shown, for example, in FIG. 6. In other words, the testing apparatus of the vacuum pressurizing system is structured with a plurality of divided silicon contactors 11 a, a guide frame 2 a for integrating these silicon contactors 11 a, an FPC multilayer substrate 12 a having the electrode projected portion electrically connected to the silicon contactor 11 a integrated to the guide frame 2 a and an upper cover 5 a and a lower cover 6 a for packing in the atmospheric condition by holding the test wafer 4 via the silicon contactor 11 a integrated to the FPC multilayer substrate 12 a and guide frame 2 a and then conducting evacuation from the micro-coupler 28 a. In this vacuum pressurizing system, a vacuum hermetic packing 27 is provided between the upper cover 5 a and lower cover 6 a. Even in this structure, the silicon contactor 11 a and guide frame 2 a have the functions similar to that of the mechanical pressurizing system and moreover the FPC multilayer substrate 12 a has the function similar to that of the ceramic substrate 12.

[0157] Also, on the occasion of conducting the wafer level burn-in process using the testing apparatus of the vacuum pressurizing system, the screening can be conducted for the chips having possibility for generating a fault in future, in the similar manner as the mechanical pressurizing system, by pressurizing each silicon contactor 11 a which moves individually with the atmospheric pressure to equally place each probe 17 of this silicon contactor 11 a in contact with each test pad of each chip of the test wafer 4 with the predetermined pressure and by obtaining the test result signal for the supply of the test control signal under the condition that the silicon contactor blocks 11 a integrated with the guide frame 2 a, FPC multilayer substrate 12 a and test wafer 4 are packed with the upper cover 5 a and lower cover 6 a of the wafer level burn-in cassette.

[0158] Next, the wafer level burn-in process based on the wafer full surface simultaneous contact system of the divided contactor integration type will be explained in detail with reference to FIG. 7 to FIG. 9. FIG. 7 is a schematic block diagram showing each chip of the test wafer. FIG. 8 is an explanatory diagram showing a silicon contactor. FIG. 9 is an explanatory diagram showing the relationship between the silicon contactor and chip.

[0159] Each chip 41 of the test wafer 4 has, as shown in FIG. 7, a memory circuit 42 and a BIST (Built-in Self Test) circuit 43 for wafer level burn-in process and this BIST circuit 43 is also provided with a register circuit 44, a control circuit 45, a counter circuit 46 and a decoder circuit 47. As the test pad 48 of this BIST circuit 43, the six pins for wafer level burn-in clock signal, test mode set signal, wafer level burn-in entry signal, input/output signal, power supply and the ground are assigned. The test pad 48 of these six pins is isolated into a side or two sides (one side is preferable) in the periphery of chip 41 and a certain interval is provided actually for allocation for the other pad.

[0160] In this BIST circuit 43 for wafer level burn-in process, the register circuit 44, control circuit 45 and counter circuit 46 operate in synchronization with the clock signal for wafer level burn-in process. The wafer level burn-in test starts with an input of the test mode set signal and wafer level burn-in entry signal and executes the burn-in test of the memory circuit 42 by decoding the test pattern with a decoder circuit 47 during the increment of address with the counter circuit 46 based on the control of the control circuit 45 using the test data inputted to the register circuit 44 as the input signal. As a result of the burn-in test, a good/no-good discrimination signal of the memory circuit 42 is outputted as the output signal via a discrimination circuit 49. Moreover, as the output signal, a carry signal of the counter circuit 46 is outputted as the signal for confirming the burn-in test.

[0161] Moreover, each silicon contactor 11 (including 11 a) is formed in the size having the probe of 216 pins corresponding to 36 chips 41 because one silicon contactor 11 corresponds to a unit of a plurality of chips of the test wafer 4. That is, the number of probes=6 pins×36 chips=216 pins (6 pins/chip is realized for the number of chips=9 chips×4 columns=36 by comprising the BIST circuit 43 for wafer level burn-in. The 22 silicon contactors 11, for example, correspond to a sheet of test wafer 4 depending on the number of chips obtained of the test wafer 4.

[0162] In regard to the relationship between this silicon contactor 11 (including 11 a) and the chip 41, the position of the divided area 50 of the silicon contactor 11 is deviated from the scribe area 51 of each chip, for example, as shown in FIG. 9. That is, the edge position of silicon contactor 11 is deviated from the edge position of chip 41, the edge of silicon contactor 11 is positioned almost on the center line of the chip 41 in the vertical direction in FIG. 9 and the edge of silicon contactor 11 is positioned between the test pad 48 of chip 41 and the edge in the horizontal direction.

[0163] In the relationship between the silicon contactor 11 (including 11 a) and chip 41 as explained above, each probe 17 of a sheet of silicon contactor 11 is placed electrically in contact with the test pad 48 of each chip 41 in unit of a plurality of chips to thereby supply, to each chip 41, the clock signal for wafer level burn-in, test mode set signal, wafer level burn-in entry signal and test data as the control signal in order to obtain the good/no-good discrimination signal as the test result signal. Thereby, whether a chip has the possibility for a fault in future or not can be discriminated.

[0164] Therefore, according to this embodiment, following effects may be attained by employing the structure of the testing apparatus for wafer level burn-in explained above and the wafer full surface simultaneous contact system of the divided contactor integration.

[0165] (1) The fabrication yield of the silicon contactors 11 (11 a) divided into a plurality of contactors for a sheet of test wafer 4 can be remarkably improved in comparison with the integrated contactor. That is, in the ordinary wafer full surface simultaneous contact system, electrical probe and pad are necessary. Therefore, it is difficult to produce an integrated contactor for the wafer full surface contact and the fabrication yield is deteriorated, resulting in increase of fabrication cost. However, when such contactor is divided into the smaller contactors, fabrication becomes as much easier, fabrication yield rises and the fabrication cost becomes lower.

[0166] (2) The integrated contactor inevitably becomes larger than the test wafer 4 when lead-out of wire is considered and therefore the fabrication facilities must be increased in size with increase of the diameter of test wafer 4. Meanwhile, since the divided silicon contactors 11 (11 a) are never determined depending on the size of the test wafer 4, the fabrication cost of contactor can be lowered. In other words, the test wafer 4 tends to increase, for example, up to 12 inches from 8 inches. In this case, the wafer full surface simultaneous contact system for wafers of 12 inches requires the technical development including the new facilities for the integrated contactor, but can also utilizes the already developed facilities for wafers of 8 inches or less for the divided contact system.

[0167] (3) When the silicon contactor 11 (11 a) is used as the wafer full surface simultaneous contact system, it is out of the thinking to use the latest facility of LSI as the fabrication facilities of silicon contactor 11 (11 a) and moreover since the old facility still has sufficient process accuracy of the silicon contactor 11 (11 a), the divided contactor integration type system of this embodiment is essential. That is, the silicon contactor 11 (11 a) only requires the processing accuracy, for example, of about ±2 to ±5 μm but does not require the scale-down processing accuracy required for fabrication of LSI. However, on the occasion of fabrication of the integrated wafer full surface simultaneous contactor considering the test wafer 4, the pre-processing facilities such as similar diffusion and etching are required. This requirement can be attained with introduction of the divided contactor integration type. Moreover, since the old facilities for fabrication of LSI can also be utilized as the fabrication facilities for silicon contactor 11 (11 a) the fabrication cost can be lowered.

[0168] (4) Since the divided silicon contactor 11 (11 a) may be individually repaired, fabrication cost and maintenance cost can be lowered. That is, since the divided contact type may be repaired, a fault of the burn-in cassette may be regenerated in the course of the fabrication and moreover the repair in the mass-production line can also be conducted in unit of the divided contactor.

[0169] (5) With introduction of the divided silicon contactor 11 (11 a), warp and wave of the test wafer 4 can easily be equalized. That is, when the divided silicon contactors 11 (11 a) are integrated, these can operate individually and equalization of warp and wave of the test wafer 4 can be conducted independently.

[0170] (6) When the wafer full surface simultaneous contactor based on the divided silicon contactor 11 (11 a) is used for wafer level burn-in, the silicon contactor 11 (11 a) is optimum for thermal expansion coefficient at a high temperature. That is, since the test wafer 4 and silicon contactor 11 (11 a) show the similar thermal expansion coefficient even for the temperature conditions of burn-in test, sufficient alignment accuracy of probe for full surface of wafer can be obtained. Moreover, since the guide frame 2 also shows the thermal expansion coefficient similar to that of the test wafer 4, the positioning accuracy may be controlled within the allowable range.

[0171] (7) The guide frame 2 for the divided silicon contactor 11 (11 a) may be set in larger size without relation to reduction in size of the scribe area 51 of the test wafer 4. That is, the divided contact system requires the guide frame 2 for integration but a larger size of the guide frame 2 can be attained without any limitation on the size of the scribe area 51. Moreover, although the scribe area 51 tends to be reduced in size in order to improve the number of chips of test wafer 4 to be obtained, this requirement can also be achieved. In addition, a degree of freedom for design, such as size and accuracy of the divided silicon contactor 11 (11 a) can be set large without any limitation on the scribe area 51.

[0172] (8) Since each chip 41 of the test wafer 4 is provided with the BIST circuit 43 for wafer level burn-in, the number of test pads 48 can be reduced and allocation of the test pad 48 can be optimized. Namely, since a test pattern is generated at the inside of each chip 41, the number of input/output pads from the external side can be minimized and thereby the number of probes 17 of silicon contactor 11 (11 a) can also be minimized.

[0173] The present invention has been explained practically based on the preferred embodiment thereof, but the present invention is never limited only to the preferred embodiment explained above and allows various changes and modifications within the scope of the claims.

[0174] For example, the silicon contactor is used as the wafer full surface simultaneous contact system based on the divided contactor integration type in the preferred embodiment, but it is also possible to use the silicon membrane sheet in place of the silicon contactor depending on the application field. Moreover, when the probe of silicon contactor is placed in contact with the test wafer in the predetermined pressure, it is possible to place the probe of silicon contactor in contact with the test wafer through pressurization not only with the vacuum pressurization method but also with the evacuated pressurization method.

[0175] Moreover, the wafer level burn-in cassette structure is not limited only to the example explained above and it is possible to use any structure including the silicon contactor that is divided into a plurality of contactors for at least a sheet of test wafer. Moreover, the number of divisions of silicon contactor for a sheet of test wafer and the number of chips covered with only one silicon contactor may be changed to various values.

[0176] In above explanation, the present invention is applied to the wafer level burn-in test of SRAM that is the technical field belonging to the present invention but the present invention is not limited only to such field and can also be applied to the memory LSI such as DRAM and flash memory and the logic LSI or the like. In addition, the present invention can surely be applied widely to the wafer delivery products, semiconductor products such as MCP products and wafer level burn-in test or the like.

[0177] Moreover, the present invention can be applied not only to the wafer level burn-in but also to the ordinary burn-in test and probe test. In this case, the effect similar to that for the wafer level burn-in can also be achieved.

[0178] The effects obtained with the typical inventions disclosed in this specification may be explained briefly as follows.

[0179] Namely, the testing apparatus and the fabricating apparatus for the semiconductor integrated circuit device of the present invention can be applied to the burn-in test and probe test. Particularly, in the wafer level burn-in, the fabrication cost can be lowered by employing the divided contactor integration type, placing the divided contactor in contact uniformly with the full surface of wafer, enabling the repair of individual divided contactors and improving the fabrication yield of the divided contactors. 

What is claimed is:
 1. A testing apparatus of a semiconductor integrated circuit device comprising: (a) a plurality of test stylus sections to perform electrical test in contact with a plurality of terminals provided on a first main plane of a wafer on which a plurality semiconductor integrated circuit devices are formed; (b) a single layer or a plurality of layers of a first wiring layer connected to a plurality of said test stylus sections; and (c) a plurality of wiring/stylus composite plates, each plate thereof including said first wiring layer, in which a plurality of test stylus sections are held in the manner that each tip of said test stylus sections is projected toward the first main plane.
 2. A testing apparatus of a semiconductor integrated circuit device according to claim 1, wherein each plate of a plurality of said wiring/stylus composite plates allocates said test stylus sections to measure a plurality of chip regions formed on said first main plane of said wafer.
 3. A testing apparatus of a semiconductor integrated circuit device according to claim 2, wherein said test stylus sections are allocated to execute the measurement by placing a plurality of terminals in a first chip region in a plurality of chip regions formed on said first main plane of said wafer in contact with the test styluses of both first and second wiring/stylus composite plates among a plurality of said wiring/stylus composite plates.
 4. A testing apparatus of a semiconductor integrated circuit device according to claim 3, wherein the number of said wiring/stylus composite plates is 4 or more.
 5. A testing apparatus of a semiconductor integrated circuit device according to claim 3, wherein the number of said wiring/stylus composite plates is 9 or more.
 6. A testing apparatus of a semiconductor integrated circuit device according to claim 5, wherein the number of chip regions to be measured covered with each plate among a plurality of said wiring/stylus composite plates is 9 or more.
 7. A testing apparatus of a semiconductor integrated circuit device according to claim 5, wherein the number of chip regions to be measured covered with each plate among a plurality of said wiring/stylus composite pltes is 16 or more.
 8. A testing apparatus of a semiconductor integrated circuit device according to claim 7, wherein a plurality of said wiring/stylus composite plates use a plate member that is mainly composed of silicon as the principal structural element.
 9. A testing apparatus of a semiconductor integrated circuit device according to claim 8, wherein said wafer uses a plate member that is mainly composed of silicon as the principal structural element.
 10. A testing apparatus of a semiconductor integrated circuit device according to claim 9, wherein said electrical test is a burn-in test.
 11. A method of fabricating a semiconductor integrated circuit device comprising the steps of: (a) preparing for a plurality of test stylus sections to perform electrical test in contact with a plurality of terminals provided on the first main plane of a wafer on which a plurality semiconductor integrated circuit devices are formed, a single layer or a plurality of layers of the first wiring layer connected to a plurality of said test stylus sections, and a plurality of wiring/stylus composite plates, each plate thereof respectively including said first wiring layer, in which a plurality of test stylus sections are held in the manner that each tip of a plurality of said test stylus sections is projected toward the first main plane; and (b) conducting electrical tests of a plurality of said chip regions by placing a plurality of said test styluses of each plate among a plurality of wiring/stylus composite plates in contact with a plurality of said terminals of a plurality of chip regions formed on said first main plane of said wafer.
 12. A method of fabricating a semiconductor integrated circuit device according to claim 11, wherein said electrical test is a burn-in test.
 13. A method of fabricating a semiconductor integrated circuit device comprising the steps of: (a) preparing for a plurality of test stylus sections to perform electrical test in contact with a plurality of terminals provided on the first main plane of a wafer on which a plurality semiconductor integrated circuit devices are formed, a single layer or a plurality of layers of the first wiring layer connected to a plurality of said test stylus sections, and a plurality of wiring/stylus composite plates, each plate thereof respectively including said first wiring layer, in which a plurality of test stylus sections are held in the manner that each tip of a plurality of said test stylus sections is projected toward the first main plane; and (b) conducting electrical tests by placing test styluses of a plurality of said test stylus sections of both first and second wiring/stylus composite plates among a plurality of wiring/stylus composite plates in contact with a plurality of terminals of the first chip region among a a plurality of chip regions formed on said first main plane of said wafer.
 14. A method of fabricating a semiconductor integrated circuit device according to claim 13, wherein said electrical test is a burn-in test.
 15. A method of fabricating a semiconductor integrated circuit device comprising the steps of: (a) preparing for a plurality of test stylus sections to perform electrical test in contact with a plurality of terminals provided on the first main plane of a wafer on which a plurality semiconductor integrated circuit devices are formed, a single layer or a plurality of layers of the first wiring layer connected to a plurality of said test stylus sections, and a plurality of wiring/stylus composite plates, each plate thereof respectively including said first wiring layer, in which a plurality of test stylus sections are held in the manner that each tip of a plurality of said test stylus sections is projected toward the first main plane; and (b) conducting electrical tests of a plurality of said chip regions by placing a plurality of said test stylus sections of each plate among of a plurality of said wiring/stylus composite plates in contact with a plurality of said terminals of a plurality of said chip regions including the BIST circuit formed on said first main plane of said wafer.
 16. A method of fabricating a semiconductor integrated circuit device according to claim 15, wherein said electrical test is a burn-in test.
 17. A method of fabricating a semiconductor integrated circuit device comprising the steps of: (a) preparing for a plurality of test stylus sections to perform electrical test in contact with a plurality of terminals provided on the first main plane of a wafer on which a plurality semiconductor integrated circuit devices are formed, a single layer or a plurality of layers of the first wiring layer connected to a plurality of said test stylus sections, and a plurality of wiring/stylus composite plates, each plate thereof respectively including said first wiring layer, in which a plurality of test stylus sections are held in the manner that each tip of a plurality of said test stylus sections is projected toward the first main plane; and (b) conducting electrical tests of a plurality of said chip regions by placing, with a vacuum or an evacuation pressurizing method, a plurality of said test stylus sections of each plate among a plurality of wiring/stylus composite plates in contact with a plurality of terminals of a plurality of chip regions formed on said first main plane of said wafer.
 18. A method of fabricating a semiconductor integrated circuit device according to claim 17, wherein said electrical test is a burn-in test. 